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Acquisition data example

Acquisition data example

1. Aging of hydrogen-terminated silicon

Purpose/ Experiment

We examined how silicon wafers with surfaces terminated with hydrogen by HF treatment changed over time. The hydrogen adsorbed on the surface was desorbed and evaluated.
The experiment and evaluation were performed using the following procedure.
1.Hydrogen-terminated Si chips were prepared to be used in the experiment.
2.Thermal desorption experiments were performed on Si chips held for 2, 7, 14 and 28 days after sample preparation. Heating rate = 60K/sec.
3.The desorption signals of the desorbed hydrogen are compared.

Result

As shown in the following figure, hydrogen on the surface decreases with the passage of time.
To what extent it decreases, further tracking experiments are needed.

 

hf si H2
The reason for the reduction of hydrogen on the surface is thought to be that oxidation proceeds and hydroxyl groups are generated on the surface.
The following figure shows how hydrogen and hydroxyl groups on the surface associate and water is released.
As expected, the amount of water increases over time.
hf si H2O

2. Data of hydrogen ion implanted sample

hydrogen ion implanted sample 1E16/c㎡
tds Hinplant stdsample data1E16

hydrogen ion implanted sample 1E17/c㎡
tds Hinplant stdsample data1E17

The temperature at which the peak appears depends on various conditions, so there are differences depending on the equipment.

3. Reproducibility data of hydrogen ion implanted sample

hydrogen ion implanted sample 1E17/c㎡ 4 times measurement
tds Hinplant stdsample data1E17 4data

The temperature at which the peak appears depends on various conditions, so there are differences depending on the equipment.

4. Data of calcium oxalate coated Ar ion implanted sample

Data of calcium oxalate coated argon ion implanted sample
tds ArinplantCalciumoxalate sample data

The temperature at which the peak appears depends on various conditions, so there are differences depending on the equipment.

5. Hydrogen desorption characteristics of hydrogen-charged low carbon mild steel plates (Low temperature TDS)

Hydrogen desorption characteristics of hydrogen-charged low carbon mild steel plates
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