Installation of thermal insulation jackets

  • From the software, turn off the spectrometer (QMS) SEM and filament.
  • Turn off the power of the QMS on the touch panel.
  • Disconnect the power cable and communication cable connected to the QMS controller.
  • Use a hex wrench to loosen the mounting screws and remove the QMS controller.
  • Check the mounting condition of the temperature sensor.
  • Attach a protective cover to each viewing port.
  • Remove the upper thermocouple introduction terminal connector.
  • Attach the insulation jackets.


There are two insulation jackets, for the main chamber and for the sample transfer mechanism.

The heat insulation jacket of the main chamber section is installed from the front side of the device, and fixed with Velcro on the back side and the top.
On the back side, the main chamber vacuum gauge sensor (IG) and the turbo molecular pump are mounted, so there is little clearance; perform the work carefully.


Baking settings

  • Set the baking time or end date and time on the touch panel.

  • Press the start button to start.
  • Baking is started by the above operation and it is heated to the set temperature.
  • When the set time or set date and time is reached, the output to the heater is shut off.

Processing after baking

  • Wait for the temperature to drop to near room temperature.
  • Remove the insulation jackets, attach the QMS controller, connect wires, and return each part to its original state.

Rotary pump oil change procedure

It is recommended to change the Rotary pump oil once a year.

  • Rest (Stop) the instrument according to the manual.
  • Make sure that the rotary pump (RP) main body is cold.
  • Remove the quick clamp and metal connector.
  • Open the oil inlet.
  • Arrange the oil drain so that there will be no spilled oil and open the drain. Please note that the oil comes out at once.
  • When the oil is drained, close the oil drain.
  • Supply the specified amount of oil from the oil inlet.
  • Close the oil inlet and assemble in the reverse order.


  • The used oil may contain highly toxic substances, so protective eyewear and gloves that are resistant to oils and chemicals must be worn when replacing the oil.
  • Apply a protective sheet to the floor so that there is no oil spattered when the RP is lowered.
  • Immediately after the RP operation is stopped, the oil may be quite hot, and there is a risk of burns.
  • Dispose of oil properly.
  • Do not use any oil other than our supplied oil or manufacturer's pure oil.
  • Be careful not to drop the RP, as it is heavy.
  • IThe oil change work should be performed by an experienced service person.
  • Please feel free to contact us if you have any questions.
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